# Article

Plasma Investigations
2010. V. 48. № 2. P. 157–162
Ulanov I.M., Isupov M.V., Litvintzev A.Yu., Mishchenko P.A.
Transformer plasma generator as plasma-chemical reactor
Annotation
An atmospheric-pressure transformer plasma generator with a power of up to $50$ kW is developed and manufactured. The thermophysical and electrophysical characteristics are studied of a discharge of up to $20$ kW at atmospheric pressure of an argon-hydrogen mixture and current frequency of $100$ kHz. The example of silicon tetrachloride is used for demonstrating the possibility of performing various reducing plasmachemical reactions which yield high-purity reaction products. The example of monosilane is used to demonstrate the possibility of preparing nanopowders of substances and their compounds.
Article reference:
Ulanov I.M., Isupov M.V., Litvintzev A.Yu., Mishchenko P.A. Transformer plasma generator as plasma-chemical reactor, High Temp., 2010. V. 48. № 2. P. 157