Article

Short Communications
1995. V. 33. № 1. P. 162–164
Kostanovskii A.V., Gusev M.K.
Deposition of thin films during thermal vaporization of aluminum nitride in a vacuum
Article reference:
Kostanovskii A.V., Gusev M.K. Deposition of thin films during thermal vaporization of aluminum nitride in a vacuum, High Temp., 1995. V. 33. № 1. P. 162