Article
Methods of Experimental Investigation and Measurements
1992. V. 30. № 2. P. 300–305
Magunov A.N., Mudrov E.V.
Measuring the temperature of a silicon chip in a plasmochemical reactor by laser interferometry
Article reference:
Magunov A.N., Mudrov E.V. Measuring the temperature of a silicon chip in a plasmochemical reactor by laser interferometry, High Temp., 1992. V. 30. № 2. P. 300
Magunov A.N., Mudrov E.V. Measuring the temperature of a silicon chip in a plasmochemical reactor by laser interferometry, High Temp., 1992. V. 30. № 2. P. 300
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ISSN: 0040-3644 (Russian version)
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ISSN: 1608-3156 (Online version)
ISSN: 1608-3156 (Online version)
