Article

Methods of Experimental Investigation and Measurements
1992. V. 30. № 6. P. 980–985
Matsevityi Yu.M., Erzhanov R.Zh., Timchenko V.M., Sheryshev V.p.
Optimizing semiconductor-wafer activation-annealing parameters
Article reference:
Matsevityi Yu.M., Erzhanov R.Zh., Timchenko V.M., Sheryshev V.p. Optimizing semiconductor-wafer activation-annealing parameters, High Temp., 1992. V. 30. № 6. P. 980