Article
Thermophysical Properties of Materials
1991. V. 29. № 5. P. 708–711
Zhylyakov L.A., Kostanovskii A.V.
Electrophysical properties of thin films made by reactive evaporation of aluminum nitride
Article reference:
Zhylyakov L.A., Kostanovskii A.V. Electrophysical properties of thin films made by reactive evaporation of aluminum nitride, High Temp., 1991. V. 29. № 5. P. 708
Zhylyakov L.A., Kostanovskii A.V. Electrophysical properties of thin films made by reactive evaporation of aluminum nitride, High Temp., 1991. V. 29. № 5. P. 708