Article

Plasma Investigations
1983. V. 21. № 1. P. 19–25
Gusev V.V., Dolgopolov V.M., Slovetskii D.I., Shelykhmanov E.F.
Spectral features of a HF discharge plasma in etching aluminum
Article reference:
Gusev V.V., Dolgopolov V.M., Slovetskii D.I., Shelykhmanov E.F. Spectral features of a HF discharge plasma in etching aluminum, High Temp., 1983. V. 21. № 1. P. 19