Article
Plasma Investigations
2011. V. 49. № 6. P. 775–787
Lebedev Yu.A., Tatarinov A.V., Epshtein I.L.
3D Simulation of Electrodynamics of a Microwave Low Pressure Discharge
Annotation
The structure of microwave fields in a discharge chamber used for obtaining electrode microwave discharge is investigated. It is shown that 3D–simulation allows quantitatively determining the optimumal structural parts of the discharge chamber for discharge generation. The represented results of self-consistent simulation of the discharge in nitrogen and hydrogen at a pressure of 1 torr are qualitatively consistent with experimental results.
Article reference:
Lebedev Yu.A., Tatarinov A.V., Epshtein I.L. 3D Simulation of Electrodynamics of a Microwave Low Pressure Discharge, High Temp., 2011. V. 49. № 6. P. 775
Lebedev Yu.A., Tatarinov A.V., Epshtein I.L. 3D Simulation of Electrodynamics of a Microwave Low Pressure Discharge, High Temp., 2011. V. 49. № 6. P. 775
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Impact factor 2022: 1.0
ISSN: 0040-3644 (Russian version)
ISSN: 0018-151X (English version)
ISSN: 1608-3156 (Online version)
ISSN: 1608-3156 (Online version)
