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Article

Plasma Investigations
2000. V. 38. № 3. P. 363–366
Shuaibov A.K., Shimon L.L., Dashchenko A.I., Shevera I.V.
Characteristics of transverse volume discharge in CF2Cl2 and in Ar/CF2Cl2 mixture
Annotation
The conditions of ignition and the characteristics are given for a nanosecond transverse volume discharge in Freon-12 (CF2Cl2) and in an Ar/CF2Cl2 mixture. It is shown that, in the ultraviolet and visible ultraviolet spectral region, a plasma based on CF2Cl2 molecules is a source of radiation of excited carbon atoms and Cl2 molecules. The volumetric stage of the discharge exists at Ucharge12 kV and [CF2Cl2]=0.13 kPa, and the current and voltage oscillograms are similar to the respective characteristics of a transverse discharge with prior-to-prebreakdown electron multiplication in He(Ne)/SF6(F2) mixtures. A plasma of an Ar/CF2Cl2 mixture is a source of radiation of the λ=258 nm bands for Cl2, 193 nm for ArF, and 175 nm for ArCl. Such sources may be used in short-wave pulse photometry, microelectronics, and photo- and biochemistry.
Article reference:
Shuaibov A.K., Shimon L.L., Dashchenko A.I., Shevera I.V. Characteristics of transverse volume discharge in CF2Cl2 and in Ar/CF2Cl2 mixture, High Temp., 2000. V. 38. № 3. P. 363