Article

Heat and Mass Transfer and Physical Gasdynamics
1998. V. 36. № 2. P. 263–268
Gladush G.G., Kurkina L.G., Rodionov N.B.
Special features of gasdynamic and diffusion processes in reactors for deposition of thin films
Article reference:
Gladush G.G., Kurkina L.G., Rodionov N.B. Special features of gasdynamic and diffusion processes in reactors for deposition of thin films, High Temp., 1998. V. 36. № 2. P. 263