Article

Methods of Experimental Investigation and Measurements
1989. V. 27. № 6. P. 948–952
Kirillin A.V., Kostanovskii A.V., Zhylyakov L.A.
Synthesis of thin-films of aluminum nitride
Article reference:
Kirillin A.V., Kostanovskii A.V., Zhylyakov L.A. Synthesis of thin-films of aluminum nitride, High Temp., 1989. V. 27. № 6. P. 948