Sheryshev V.p. - article list
- Modeling heat and mass transfer during activation annealing of gallium arsenide semiconductor pPlates
Matsevityi Yu.M., Balashova N.V., Multanovskii A.V., Panasenko P.V., Timchenko V.M., Sheryshev V.p. - Optimizing semiconductor-wafer activation-annealing parameters
Matsevityi Yu.M., Erzhanov R.Zh., Timchenko V.M., Sheryshev V.p.
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Impact factor 2022: 1.0
ISSN: 0040-3644 (Russian version)
ISSN: 0018-151X (English version)
ISSN: 1608-3156 (Online version)
ISSN: 1608-3156 (Online version)
