Shelykhmanov E.F. - article list
- Spectral features of a HF discharge plasma in etching aluminum
Gusev V.V., Dolgopolov V.M., Slovetskii D.I., Shelykhmanov E.F.
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Impact factor 2022: 1.0
ISSN: 0040-3644 (Russian version)
ISSN: 0018-151X (English version)
ISSN: 1608-3156 (Online version)
ISSN: 1608-3156 (Online version)
